First-Principles Calculation on CMP Process of Glass Surface by CeO2 Particle and Design of Alternative Abrasive Grain
1 : Fracture and Reliability Research Institute, Graduate School of Engineering, Tohoku University
6-6-11, Aoba, Aramaki, Aoba-ku, Sendai 980-8579 -
Japan
| Subject : | : | oral |
| Topics | : | T5/6 - Complex tribochemical environments |
| Keywords | : | Chemical mechanical polishing ; First principles calculations ; Perovskite oxide |
| PDF version | : |  PDF version |
